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Facilities : Overview


The SMFL Facility started out as the RIT Microelectronic Engineering cleanroom facility. It was built in 1985 to support the first ABET accredited undergraduate program in Microelectronic Engineering. Dr. Lynn Fuller, Dean Richard Kenyon, and others helped to start this new engineering curriculum at RIT and were the driving force behind the construction of the current building. A federal grant provided $5.5M toward the construction of the Center for Microelectronic and Computer Engineering which houses the cleanroom.

The main portion of the facility is 10,000 sq. ft. of class 1000 cleanroom with a bay and chase configuration. Additional laboratory space includes a class 100/10 MEBES E-beam Laboratory (established by Perkin-Elmer), a surface analysis laboratory, and a chemical-mechanical planarization laboratory.

Some statistics

  • 10,000 square feet of Class 1000, 100, & 10 cleanroom space.
  • Complete equipment set for 100 & 150mm CMOS processing.
  • Bay & chase design.

The RIT Microsystems Initiative

The cleanroom facility is an integral part of the RIT initiative in Microsystems, and was named the Semiconductor & Microsystems Fabrication Laboratory (SMFL) in 2001.

The SMFL was made a separate entity within the RIT College of Engineering and continues to support the Microelectronics Undergraduate and Graduate programs as well as many other programs within the Institute.

The SMFL offers processing resources and technical expertise in the design and development of microsystems to industrial and academic customers.

The SMFL mission encompasses education, research and industrial partnership. In addition to providing faculty and students with exceptional resources for education and research, a principal objective is to become the choice organization for applied solutions in microdevice design, process development, microsystem integration, and prototype fabrication.

SMFL Support of the RIT IT Collaboratory

The IT Collaboratory expansion was opened in the spring of 2006. The first floor supports;

The second floor of the IT collaboratory is home to the research activities of the Rochester Imaging Detector Laboratory (RIDL).(Dr. Donald Figer) The SMFL supports the activities of the researchers in these labs.

SMFL Fabrication Capabilities

In addition to being a fabrication resource providing process services, the SMFL offers various levels of facility use for research and development activity. Customers have the option of using the facility for its process resources only, or interacting with SMFL staff and/or RIT faculty and students.

Last Updated: February 8, 2017
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