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Facilities : Overview

Background

The SMFL is a separate entity within the RIT College of Engineering and supports the Microelectronics Undergraduate and Graduate programs as well as many other programs within the Institute. The SMFL offers processing resources and technical expertise in the design and development of microsystems to industrial and academic customers.

The main portion of the facility is 10,000 sq. ft. of class 1000 cleanroom with a bay and chase configuration. Additional laboratory space includes a class 100/10 Laboratory and an MOCVD Growth Laboratory. The SMFL has a complete equipment set for 150mm CMOS processing.

The SMFL mission encompasses education, research and industrial partnership. In addition to providing faculty and students with exceptional resources for education and research, a principal objective is to become the choice organization for applied solutions in microdevice design, process development, microsystem integration, and prototype fabrication.

SMFL Fabrication Capabilities

In addition to being a fabrication resource providing process services, the SMFL offers various levels of facility use for research and development activity. Customers have the option of using the facility for its process resources only, or interacting with SMFL staff and/or RIT faculty and students.

Last Updated: February 28, 2020
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