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Tool Status : Last Updated November 11, 2009 11:49 AM

Tool Status Legend
	Tool is up and process capable
	Tool is down for process
	Tool is down for maintainence / PM
	Tool is available with limitations - See technician
	Tool to be installed - Work planned / progressing

Tool	Status	Technician	Comments
Lithography
Canon Stepper		David Yackoff
CEE Resist Developer		David Yackoff
CEE Resist Spinner		David Yackoff
GCA Stepper		David Yackoff
MEBES III		Scott Blondell
SCS Resist Coater		David Yackoff
SSI Track		Bruce Tolleson
Suss MA 150 Aligner		David Yackoff
Suss MA55 Contact Aligner		David Yackoff
SVG Track		David Yackoff
PVD
Anatech Sputter		John Nash
CHA Ebeam Evaporator		Richard Battaglia
CHA Flash Evaporator		Richard Battaglia
CVC 601 Sputter		Richard Battaglia
CVC Thermal Evaporator		Richard Battaglia
Denton Sputter		John Nash
PE2400A Sputter		Richard Battaglia
PE2400B Sputter		John Nash	Can be brought up upon request
PE4400 Sputter		John Nash
Plasma Etch
Branson Asher		Scott Blondell
Drytek Quad - Chamber 1 to 3		Bruce Tolleson	Added plate to elevator to prevent misalignement of the cassette.
Drytek Quad - Chamber 4		Bruce Tolleson
LAM 4600 Al Etcher		John Nash
LAM 490		Richard Battaglia
Tegal 415 Asher		John Nash
Trion Etcher		Richard Battaglia
Xactic Etcher		Dr. Alan Raisanen
Thermal / Implant
AG 610A RTP		David Yackoff	water leak
AG 610B RTP		David Yackoff	DOWN FOR TEMP READING ERROR
Bruce 1 - Tube 1		David Yackoff
Bruce 1 - Tube 2		David Yackoff
Bruce 1 - Tube 3		David Yackoff
Bruce 1 - Tube 4		David Yackoff	Argon installed on tube and NO2 removed
Bruce 2 - Tube 5		John Nash
Bruce 2 - Tube 6		John Nash
Bruce 2 - Tube 7		John Nash
Bruce 2 - Tube 8		John Nash
Heraeus Vacuum Oven		David Yackoff
Varian 350D Implanter		Richard Battaglia	New Diff Pump Heater
CVD
AME P5000 Chamber A		John Nash
AME P5000 Chamber B		John Nash	Repairing RF coil
AME P5000 Chamber C		John Nash
ASM LPCVD Tube 1		Bruce Tolleson	New N2O MFC Installed
ASM LPCVD Tube 2		Bruce Tolleson
SMFL Parylene		Dr. Alan Raisanen
Wet Etch
Wet Bench - Al Etch and Solvent Strip		David Yackoff
Wet Bench - BOE and Pad Etch		David Yackoff
Wet Bench - Manual Process 2		David Yackoff
Wet Bench - Nitride and Silicon Etch		David Yackoff
Wet Bench - RCA General Clean		Scott Blondell
Wet Bench - RCA MOS Clean		David Yackoff
Wet Bench - Ultrasonic		David Yackoff
Metrology
Amray 1830 SEM #2		Bruce Tolleson
CDE ResMap		David Yackoff
Leica Microscope		Bruce Tolleson
Leitz Optical Measurement Station		David Yackoff
Nanometrics Spectrophotometers		David Yackoff
Prometrix SpectraMap FT500		Bruce Tolleson
Prometrix SpectraMap SM300		Bruce Tolleson
Rudolph IV Ellipsometer		Richard Battaglia
Smith AMRAY 1830		Richard Battaglia
Surface Charge Analyzer		Scott Blondell
Tencor 364 SurfScan		Richard Battaglia
Tencor Alpha 200 Profilometer		David Yackoff
Tencor P2 Profilometer		John Nash
VASE Spectroscopic Ellipsometer		Dr. Alan Raisanen
Wyko Dynamic Interferometer		Dr. Alan Raisanen
Wyko Profiler		Dr. Alan Raisanen
CMP / Packaging
Ecomet Grinder		Bruce Tolleson
KS 775 Wafer Saw		Scott Blondell
Strausbaugh		Bruce Tolleson
Tempress 4 Inch Wafer Saw		Scott Blondell
Westech 372		Bruce Tolleson